Publications
Catégorie
Interne
Centre
Publications
10.1016/j.surfcoat.2020.126762
1
2021-04-06
2021
Topka K. C., Diallo B., Samelor D., Laloo R., Sadowski D., Genevois C., Sauvage T., Senocq F., Vergnes H., Turq V., Pellerin N., Caussat B., Vahlas C.
Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures
Surface & Coatings Technology # 407 13-
doi : 10.1016/j.surfcoat.2020.126762
Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures
Surface & Coatings Technology # 407 13-
doi : 10.1016/j.surfcoat.2020.126762
inrs_publi_centers
4779
CEMHTI
0
4779
0