Catégorie

Interne

Centre

Publications

10.1016/j.surfcoat.2020.126762
1
2021-04-06
2021
Topka K. C., Diallo B., Samelor D., Laloo R., Sadowski D., Genevois C., Sauvage T., Senocq F., Vergnes H., Turq V., Pellerin N., Caussat B., Vahlas C.
Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures
Surface & Coatings Technology #
407 13-
doi : 10.1016/j.surfcoat.2020.126762

inrs_publi_centers

4779
CEMHTI
0
4779
0